✦ LIBER ✦
Spectroscopic study of a D.C. discharge in an argon-silane-nitrogen gas mixture under silicon nitride thin film deposition conditions
✍ Scribed by J. L. Jauberteau; D. Duchesne; C. Girault; J. Aubreton; A. Catherinot
- Publisher
- Springer
- Year
- 1990
- Tongue
- English
- Weight
- 674 KB
- Volume
- 10
- Category
- Article
- ISSN
- 0272-4324
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