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Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering

✍ Scribed by G. Suchaneck; R. Labitzke; B. Adolphi; L. Jastrabik; P. Adamek; J. Drahokoupil; Z. Hubicka; D.A. Kiselev; A.L. Kholkin; G. Gerlach; A. Dejneka

Book ID: 113919410
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 839 KB
Volume: 205
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2011.02.050

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