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Deposition of plasma-polymerized acetylene by an intense pulsed RF plasma source

✍ Scribed by Pedrow, P.D.; Nasiruddin, A.M.; Mahalingam, R.


Book ID
117862960
Publisher
IEEE
Year
1990
Tongue
English
Weight
326 KB
Volume
18
Category
Article
ISSN
0093-3813

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