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Macroscopic and microstructural properties of CSixNy thin films deposited by RF nitrogen-plasma-assisted pulsed laser deposition

✍ Scribed by T Thärigen; M Lorenz

Book ID: 108417464
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 159 KB
Volume: 179
Category: Article
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(01)00275-6

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## Abstract Yttrium‐stabilized zirconia (YSZ) and cerium gadolinium oxide (CGO) thin films were prepared by pulsed laser deposition (PLD) under different ambient pressures and substrate temperatures. The microstructures of the obtained films are compared with existing structural zone models for thi