Explosion model applied to an intense pulsed plasma source for thin film deposition

✍ Scribed by Pedrow, P.D.; Goyal, K.O.; Mabalingham, R.; Osman, M.A.

• Book ID: 117862850
• Publisher: IEEE
• Year: 1997
• Tongue: English
• Weight: 209 KB
• Volume: 25
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/27.557490