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Deposition of NiVOx thin films by pulse magnetron sputtering with various Ar/O2 ratios

✍ Scribed by Weng, Ko-Wei; Lin, Tai-Nan; Huang, Jung-Jie; Huang, Yu-Pei


Book ID
121437536
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
546 KB
Volume
529
Category
Article
ISSN
0040-6090

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