XPS study of TiOx thin films prepared by d.c. magnetron sputtering in Ar–O2 gas mixtures

✍ Scribed by R. Gouttebaron; D. Cornelissen; R. Snyders; J. P. Dauchot; M. Wautelet; M. Hecq

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 75 KB
• Volume: 30
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/1096-9918(200008)30:1<527::aid-sia834>3.0.co;2-z