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Optical characterization of BCN films deposited at various N2/Ar gas flow ratios by RF magnetron sputtering

✍ Scribed by Vinit O. Todi; Bojanna P. Shantheyanda; Ravi M. Todi; Kalpathy B. Sundaram; Kevin Coffey

Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 502 KB
Volume: 176
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2011.05.010

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