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Deposition of microcrystalline silicon in electron-cyclotron resonance discharge (24GHz) plasma from silicon tetrafluoride precursor

✍ Scribed by Mansfeld, D.А.; Vodopyanov, А.V.; Golubev, S.V.; Sennikov, P.G.; Mochalov, L.A.; Andreev, B.А.; Drozdov, Yu N.; Drozdov, М.N.; Shashkin, V.I.; Bulkin, P.; Roca i Cabarrocas, P.

Book ID: 121670265
Publisher: Elsevier Science
Year: 2014
Tongue: English
Weight: 416 KB
Volume: 562
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2014.03.091

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