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Deposition of a-Si:H by high temperature thermal decomposition of silane

✍ Scribed by C. Horbach; W. Beyer; H. Wagner

Book ID: 115986652
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 179 KB
Volume: 114
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(89)90108-7

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