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Deposition mechanism of a-C and a-C:H

✍ Scribed by J. Robertson

Book ID: 115989326
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 276 KB
Volume: 164-166
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(93)91194-8

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