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Deposition and microhardness of SiC from the Si2Cl6-C3H8-H2-Ar system

✍ Scribed by Seiji Motojima; Noriyuki Iwamori; Tatsuhiko Hattori; Kazuyoshi Kurosawa

Publisher: Springer
Year: 1986
Tongue: English
Weight: 613 KB
Volume: 21
Category: Article
ISSN: 0022-2461
DOI: 10.1007/bf00553276

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