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Chemical vapour growth of β-SiC whiskers from a gas mixture of Si2Cl6-CH4-H2-Ar

✍ Scribed by Seiji Motojima; Mitsutaka Hasegawa; Tatsuhiko Hattori

Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 648 KB
Volume: 87
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(88)90181-9

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