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Deposition and characterization of polymorphous germanium films prepared by low frequency PECVD

✍ Scribed by M. Moreno; A. Torres; R. Ambrosio; P. Rosales; A. Heredia; A. Kosarev; E. Torres; C. Zuñiga; C. Reyes-Betanzo; M. Domínguez

Book ID: 119301147
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 718 KB
Volume: 358
Category: Article
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2012.01.061

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