Vibrational spectroscopy characterization of low-dielectric constant SiOC:H films prepared by PECVD technique

✍ Scribed by G. Das; G. Mariotto; A. Quaranta

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 268 KB
• Volume: 7
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2004.09.121