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Dependency of oxygen partial pressure on the characteristics of ZnO films grown by radio frequency magnetron sputtering

✍ Scribed by C. H. Ahn; Y. Y. Kim; S. W. Kang; B. H. Kong; S. K. Mohanta; H. K. Cho; J. H. Kim; H. S. Lee

Publisher: Springer US
Year: 2007
Tongue: English
Weight: 362 KB
Volume: 19
Category: Article
ISSN: 0957-4522
DOI: 10.1007/s10854-007-9401-7

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