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Dependence of the lateral distribution of implanted ions on tilt angle

✍ Scribed by Runge, H. ;Oppolzer, H. ;Mader, H.

Book ID: 105375701
Publisher: John Wiley and Sons
Year: 1981
Tongue: English
Weight: 119 KB
Volume: 67
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210670252

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