✦ LIBER ✦
Tilt angle and mask edge angle dependences of lateral spread of implanted boron ions under mask edge. (USA)
- Book ID
- 108390237
- Publisher
- Elsevier Science
- Year
- 1981
- Tongue
- English
- Weight
- 330 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0042-207X
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