✦ LIBER ✦
Experimental evaluation of depth-dependent lateral standard deviation for various ions in a-Si from one-dimensional tilted implantation profiles
✍ Scribed by Miyashita, T.; Suzuki, K.
- Book ID
- 114537871
- Publisher
- IEEE
- Year
- 1999
- Tongue
- English
- Weight
- 169 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0018-9383
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