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Dependence of Si+ and Si2+ sputtering yields on residual oxygen impurity

โœ Scribed by Yasuhiro Sakuma; Masahiko Kato; Shinya Yagi; Kazuo Soda

Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
453 KB
Volume
269
Category
Article
ISSN
0168-583X

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