Dependence of the Strains and Residual Mechanical Stresses on the Performances Presented by a-Si:H Thin Film Position Sensors

✍ Scribed by E. Fortunato; D. Brida; L. Pereira; H. Águas; V. Silva; I. Ferreira; M.F.M. Costa; V. Teixeira; R. Martins

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 219 KB
• Volume: 4
• Category: Article
• ISSN: 1438-1656
• DOI: 10.1002/1527-2648(20020806)4:8<612::aid-adem612>3.0.co;2-u