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Density and deposition rate of chemical-vapour-deposited boron nitride

✍ Scribed by Toshitsugu Matsuda; Hiroyuki Nakae; Toshio Irai

Publisher: Springer
Year: 1988
Tongue: English
Weight: 652 KB
Volume: 23
Category: Article
ISSN: 0022-2461
DOI: 10.1007/bf01174677

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