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Degradation effects and Si-depth profiling in photoresists using ion beam analysis

✍ Scribed by L.J. Van Ijzendoorn; J.P.W. Schellekens

Book ID: 113279928
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 299 KB
Volume: 40-41
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(89)90482-5

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