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Defects formation in the dual B+and N+ions implanted silicon

✍ Scribed by V. Popok; V. Odzhaev; V. Hnatowicz; J. Kvítek; V. Švorčik; V. Rybka


Book ID
112599519
Publisher
Springer
Year
1994
Tongue
English
Weight
365 KB
Volume
44
Category
Article
ISSN
0011-4626

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