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Transformation of radiation defect clusters in B+ ion-implanted silicon

✍ Scribed by Antonova, I. V. ;Shaimeev, S. S.

Publisher: John Wiley and Sons
Year: 1996
Tongue: English
Weight: 435 KB
Volume: 153
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2211530206

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