Defect evaluation and electrical characteristics of GaSb and In0.17Ga0.83Sb films grown by molecular beam epitaxy
โ Scribed by Kodama, M.
- Book ID
- 105383961
- Publisher
- John Wiley and Sons
- Year
- 1994
- Tongue
- English
- Weight
- 614 KB
- Volume
- 141
- Category
- Article
- ISSN
- 0031-8965
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In 0.48 Ga 0.52 P/In 0.20 Ga 0.80 As/GaAs pseudomorphic high electron mobility transistor (p-HEMT) structures were grown by solid-source molecular beam epitaxy (SSMBE) using a valved phosphorus cracker cell. The electron mobility and sheet carrier density at room temperature were 1700 cm 2 /Vs and 3