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Defect and dopant kinetics in laser anneals of Si

✍ Scribed by A. La Magna; G. Fisicaro; G. Mannino; V. Privitera; G. Piccitto; B.G. Svensson; L. Vines

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 317 KB
Volume: 154-155
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2008.08.008

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