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Deep ultra-violet Raman imaging of CVD boron-doped and non-doped diamond films

โœ Scribed by Crisci, A.; Mermoux, M.; Saubat-Marcus, B.

Book ID
122023355
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
743 KB
Volume
17
Category
Article
ISSN
0925-9635

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## Abstract Hot filament chemically vapor deposited (HFCVD) boron doped diamond films were grown on monocrystalline silicon (111) doped with B/C ratios of 4000, 8000 and 12,000 ppm. Scanning electron micrographs show that the films are composed of wellโ€faceted microcrystallites ranging in size from