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Deep Diffusion Doping of Macroporous Silicon

✍ Scribed by Astrova, E.V. ;Voronkov, V.B. ;Grekhov, I.V. ;Nashchekin, A.V. ;Tkachencko, A.G.

Publisher
John Wiley and Sons
Year
2000
Tongue
English
Weight
197 KB
Volume
182
Category
Article
ISSN
0031-8965

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Macropore Formation on Highly Doped n-Ty
Macropore Formation on Highly Doped n-Type Silicon
✍ Christophersen, M. ;Carstensen, J. ;FοΏ½ll, H. πŸ“‚ Article πŸ“… 2000 πŸ› John Wiley and Sons 🌐 English βš– 146 KB πŸ‘ 1 views

Using specially ``designedΒΊ electrolytes, it is possible to obtain macropores even in highly doped n-type silicon (0.020Β±0.060 Wcm) without illumination. Based on predictions of the Βͺcurrent-burstmodelΒΊ [phys. stat. sol. (a) 182, 63 (2000), this issue], HF-containing electrolytes were systematically