Decaborane (B10H14) ion implantation technology for sub-0.1-μm PMOSFET's

✍ Scribed by Goto, K.; Matsuo, J.; Tada, Y.; Sugii, T.; Yamada, I.

• Book ID: 114537671
• Publisher: IEEE
• Year: 1999
• Tongue: English
• Weight: 221 KB
• Volume: 46
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.753701