DC magnetron sputtered tungsten: W film properties and electrical properties of W/Si Schottky diodes
β Scribed by K. Bouziane; M. Mamor; F. Meyer
- Publisher
- Springer
- Year
- 2005
- Tongue
- English
- Weight
- 465 KB
- Volume
- 81
- Category
- Article
- ISSN
- 1432-0630
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