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CVD of Thin Titanium Dioxide Films Using Hexanuclear Titanium Oxo Carboxylate Isopropoxides

✍ Scribed by P. Piszczek; M. Richert; A. Grodzicki; E. Talik; J. Heimann

Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
503 KB
Volume
11
Category
Article
ISSN
0948-1907

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## Abstract Titanium dioxide (TiO~2~) thin films are synthesized using aerosol‐assisted (AA)CVD of titanium (IV) isopropoxide (TTIP) in methanol. Deposition is carried out on glass, steel, and titanium substrates at 400–550Β°C. The films produce morphologies that are radically different to those fro