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Low Temperature CVD of Crystalline Titanium Dioxide Films Using Tetranitratotitanium(IV

✍ Scribed by David C. Gilmer; Daniel G. Colombo; Charles J. Taylor; Jeff Roberts; Greg Haugstad; Stephen A. Campbell; Hyeon-Seag Kim; Glen D. Wilk; Michael A. Gribelyuk; Wayne L. Gladfelter

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 272 KB
Volume: 4
Category: Article
ISSN: 0948-1907
DOI: 10.1002/(sici)1521-3862(199801)04:01<9::aid-cvde9>3.0.co;2-3

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