Low-Temperature Thermal CVD of Ti–Al Metal Films Using a Strong Reducing Agent

✍ Scribed by Audunn Ludviksson; Matthew Nooney; Robert Bruno; Alec Bailey; Toivo T. Kodas; Mark J. Hampden-Smith

• Publisher: John Wiley and Sons
• Year: 1998
• Tongue: English
• Weight: 210 KB
• Volume: 4
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/(sici)1521-3862(199807)04:04<129::aid-cvde129>3.0.co;2-j