✦ LIBER ✦
Conformality Investigation of Titanium Dioxide Thin Films on 3-D Micrometer- and Nanometer-scale Features by Pulsed-Pressure Metal-organic CVD
✍ Scribed by Vilailuck Siriwongrungson; Susan P. Krumdieck; Maan M. Alkaisi
- Publisher
- John Wiley and Sons
- Year
- 2011
- Tongue
- English
- Weight
- 894 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0948-1907
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