✦ LIBER ✦

Current research topics and applications of gas cluster ion beam processes

✍ Scribed by Isao Yamada; Noriaki Toyoda

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 89 KB
Volume: 242
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.08.111

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