✦ LIBER ✦

Summary of recent research on gas cluster ion beam process technology

✍ Scribed by Isao Yamada; Noriaki Toyoda

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 244 KB
Volume: 232
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.03.044

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