𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Crystallization of silicon films by rapid joule heating method

✍ Scribed by Nobuyuki Andoh; Toshiyuki Sameshima; Kuninori Kitahara


Book ID
108287807
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
216 KB
Volume
487
Category
Article
ISSN
0040-6090

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Crystallization of silicon thin films by
✍ Gwo-Mei Wu; Chen-Yen Wu πŸ“‚ Article πŸ“… 2007 πŸ› John Wiley and Sons 🌐 English βš– 237 KB

## Abstract A modified crystallization process using current‐induced joule heating under vacuum is presented. A thin layer of high temperature resistant tungsten was sputtered on the amorphous silicon as the conducting and annealing medium. The thin film thickness was measured by α‐stepper. The hig