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Characterization of polycrystalline silicon thin films fabricated by rapid joule heating method

✍ Scribed by T. Sameshima; K. Motai; N. Andoh

Publisher: Springer
Year: 2004
Tongue: English
Weight: 303 KB
Volume: 79
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-004-2544-y

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