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Characterization of polycrystalline Ge thin films fabricated by short-pulse XeF excimer laser crystallization

✍ Scribed by Chil-Chyuan Kuo


Publisher
Springer US
Year
2008
Tongue
English
Weight
553 KB
Volume
29
Category
Article
ISSN
1573-8760

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Influence of laser energy on the crystal
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## Abstract Four Ge~2~Sb~2~Te~5~ thin films were prepared by pulsed laser deposition (PLD) at 58, 100, 140, and 190 mJ/pulse laser energy, respectively. The influence of laser energy on the crystallization of Ge~2~Sb~2~Te~5~ was investigated. The result shows that laser energy has evident effect on