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Crystallization of amorphous thin low pressure chemical vapour deposition silicon films:in situTEM measurement of grain growth rates

✍ Scribed by J. P. Guillemet; B. Mauduit; B. Pieraggi; E. Campo; E. Scheid


Book ID
104780149
Publisher
Springer
Year
1993
Tongue
English
Weight
694 KB
Volume
12
Category
Article
ISSN
0261-8028

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