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Crystallization of amorphous silicon–germanium films deposited by low pressure chemical vapor deposition

✍ Scribed by D Guillet; M Sarret; L Haji; R Rogel; O Bonnaud


Book ID
117150314
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
161 KB
Volume
266-269
Category
Article
ISSN
0022-3093

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