CuAlO 2 films were deposited on c-plane sapphire by radio-frequency (RF) reactive sputtering using a CuAlO 2 ceramic target at different deposition temperatures. The as-deposited films were found to be amorphous regardless of the deposition temperatures. After annealing at 1050 1C in air, only the f
β¦ LIBER β¦
Crystal structure of TiO2thin films grown on sapphire substrates by RF sputtering as a function of temperature
β Scribed by Geun-Hyoung Lee; Min-Sung Kim
- Book ID
- 111857065
- Publisher
- The Korean Institute of Metals and Materials
- Year
- 2010
- Tongue
- English
- Weight
- 374 KB
- Volume
- 6
- Category
- Article
- ISSN
- 1738-8090
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