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Ferroelectric properties of barium titanate thin films grown on nichrome substrates by RF sputtering

✍ Scribed by A. MÁRQUEZ-HERRERA; A. ZAPATA-NAVARRO; MA. DE LA PAZ CRUZ-JÁUREGUI


Publisher
Springer
Year
2005
Tongue
English
Weight
420 KB
Volume
40
Category
Article
ISSN
0022-2461

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CuAlO 2 films were deposited on c-plane sapphire by radio-frequency (RF) reactive sputtering using a CuAlO 2 ceramic target at different deposition temperatures. The as-deposited films were found to be amorphous regardless of the deposition temperatures. After annealing at 1050 1C in air, only the f