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Crystal phase transition of HfO_2 films evaporated by plasma-ion-assisted deposition

โœ Scribed by Wang, Jue ;Maier, Robert L. ;Schreiber, Horst


Book ID
115353996
Publisher
The Optical Society
Year
2008
Tongue
English
Weight
598 KB
Volume
47
Category
Article
ISSN
1559-128X

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