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Crystal orientation in titanium thin films deposited by the sputtering method without plasma damage

✍ Scribed by Masahiko Naoe; Satoshi Ono; Toyoaki Hirata


Book ID
118274500
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
473 KB
Volume
134
Category
Article
ISSN
0921-5093

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