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Creation of microstructures using heavy ion beam lithography

✍ Scribed by M. Varašanec; I. Bogdanović Radović; Ž. Pastuović; M. Jakšić


Book ID
113823431
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
907 KB
Volume
269
Category
Article
ISSN
0168-583X

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