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High energy heavy ion beam lithography in silicon

✍ Scribed by Bibhudutta Rout; Alexander D. Dymnikov; Daniel P. Zachry; Elia V. Eschenazi; Yongqiang Q. Wang; Richard R. Greco; Gary A. Glass


Book ID
108224002
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
992 KB
Volume
261
Category
Article
ISSN
0168-583X

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