Subject classification: 73.61.Ey; 81.15.Kk; S7.14 One-, two-and three-flow metalorganic vapor phase epitaxy (MOVPE) methods have been compared in GaN growth, and each growth is analyzed by computational fluid dynamics (CFD). It is found that two-flow method shows better growth condition for achievin
✦ LIBER ✦
Crack-Free Thick GaN Layers on Silicon (111) by Metalorganic Vapor Phase Epitaxy
✍ Scribed by Feltin, E. ;Beaumont, B. ;La�gt, M. ;de Mierry, P. ;Venn�gu�s, P. ;Leroux, M. ;Gibart, P.
- Publisher
- John Wiley and Sons
- Year
- 2001
- Tongue
- English
- Weight
- 148 KB
- Volume
- 188
- Category
- Article
- ISSN
- 0031-8965
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