Crack-free thick AlGaN grown on sapphire using AlN/AlGaN superlattices for strain management

✍ Scribed by Zhang, J. P.; Wang, H. M.; Gaevski, M. E.; Chen, C. Q.; Fareed, Q.; Yang, J. W.; Simin, G.; Khan, M. Asif

• Book ID: 120353423
• Publisher: American Institute of Physics
• Year: 2002
• Tongue: English
• Weight: 479 KB
• Volume: 80
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.1477620